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RR481 Series（L200/L230/L300）

The RR481/boomerang arm vacuum robot (double-arm) realizes the high positioning repeatability and highly reliable vacuum partition performance by adopting DDM (vacuum direct drive motor) for the drive section. The arm mechanism driven by steel belt realizes the adoption of long end-effector even with small rotation area.

Small rotation area.

Long end-effector available for long reach.

Available for narrow gate opening size (15mm).

High accuracy.

Available for ultrahigh vacuum.

High throughput.

Available for the AWC option (wafer position compensation).

Substrate size Up to 300mm wafer
Capacity 3.0kg/10 Nm, Note: For wrist attachment section (including end-effector)
Transfer distance of substrate center 715mm (for 300mm wafer)
Z-axis stroke 70mm/140mm
Rotation range Rotation not limited
Rotation diameter 530mm
Transfer accuracy (X,Y) ±0.1mm
Mass 100kg
Vacuum-proof level 10E-6 Pa
He leakage rate 5x10E-9 Pa.m3/sec He (Base vacuum 5x10E-4 Pa)
Operating temperature 80℃ or less
Materials used in vacuum Alminum, Stainless steel, AM350 (Bellows), Magnet with Ni plating spec., Fluorine-based O-ring
Motor specifications Vacuum direct drive motor (Z-axis: Servo motor)
Encoder specifications ABS
Utility 48V DC (motor drive), 24V DC (communication)
Communication specifications TCP/IP
Option Teaching pendant, Power unit (200 V AC input)