The RR491/frog leg arm vacuum robot realizes the high positioning repeatability and highly reliable vacuum partition performance by adopting DDM (vacuum direct drive motor) for the drive section. The full-link arm mechanism realizes the highly accurate positioning repeatability.
High accuracy.
Available for ultrahigh vacuum.
High throughput.
Available for the AWC option (wafer position compensation).
| Substrate size | Up to 300mm wafer, 6-inch mask, etc. |
| Transfer distance of substrate center | 778mm (for 300mm wafer) |
| Z-axis stroke | 70mm/140mm |
| Rotation range | Rotation not limited |
| Rotation diameter | 810mm |
| Transfer accuracy (X,Y) | ±0.1mm |
| Mass | 65kg |
| Vacuum-proof level | 10E-6 Pa |
| He Leak rate： | 5x10E-9 Pa.?/sec He (Base vacuum 5x10E-4 Pa) |
| Operating temperature | 80℃ or less |
| Materials used in vacuum | Alminum, Stainless steel, AM350 (Bellows), Magnet with Ni plating spec., Fluorine-based O-ring |
| Motor specifications | Vacuum direct drive motor (Z-axis: Servo motor) |
| Encoder specifications | ABS |
| Utility | 48V DC (motor drive), 24V DC (communication) |
| Communication specifications | TCP/IP |
