RA321-C0C-BW is the edge clamp type aligner which has the clamp axis, θ-axis, and Z-axis. The edge clamp method, which clamps the outer periphery of the wafer, minimizes the particles generation.

High speed and high accuracy (Notch accuracy: ±0.05°, Center accuracy: ±0.05mm)

Throughput of the system is improved (with buffer).

Handling of transparent (glass) and laminate wafers

Notch-less wares can be handled using the image sensor optionally.