The load port model RV201-F07-C can handle FOUP, Auto Door FOSB, and 200 mm open cassette in one unit, and enables short time switching between the carriers. The door opening/closing mechanism of the standard model is inherited, opening/closing of the FOUP door is precisely controlled, and high level cleanliness performance is realized.

Available for FOUP and Auto Door FOSB as a standard.

High cleanliness performance is attained by the original door opening/closing mechanism and precise motion control.

Available for 200 mm open cassette using the stage adaptor.