The model RV201-F07-T is a load port that can be coupled with each manufacturer’s stocker. The door opening/closing mechanism of the standard model is inherited, opening/closing of the FOUP door is precisely controlled, and high level cleanliness performance is realized.

Available for FOUP and Auto Door FOSB as a standard.

High cleanliness performance is attained by the original door opening/closing mechanism and precise motion control.

Original clamping mechanism is mounted.