N2 BWS is mounted together with the Wafer Sorter. The area where the Wafer is stored, such as Test Wafer and Process Wafer, is stored in a POD with low humidity and low oxygen to control the reaction of the film on the surface of the Wafer within the minimum range.
It can store 800/1600/3200 wafers
Through a small amount of N2 flow purge, low oxygen, low humidity, high cleanliness environmental control.
Auto Teaching can be realized
Through the shutter structure in front of the Wafer that can be opened and closed, the size of the opening when taking and placing the film is reduced.
